Lithography stitching error analysis and compensation
收藏科学数据银行2024-09-06 更新2026-04-23 收录
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资源简介：
The data set is the experimental data of the paper ' Alignment Accuracy Improvement in Laser Heat-mode Scanning Lithography System through Dual-galvanometer Coordinate Compensation ', including measurement data, simulation parameters, simulation results, experimental results, electron microscope images and microscope images.
提供机构：
Xiaozhong Xu
创建时间：
2024-09-05
