NIST NIST Backscattering-Correction-Factor Database for Auger Electron Spectroscopy - SRD 154

This database provides values of backscattering correction factors (BCF) of homogeneous materials for quantitative surface analyses by Auger electron spectroscopy. These BCFs are obtained from Monte Carlo simulations based on two models of electron transport in the material, a simplified model and an advanced model [A. Jablonski and C. J. Powell, Surf. Science 604, 1928 (2010)]. One assumption for the former model is that the primary-electron beam is unchanged, in intensity, energy or direction, within the information depth for Auger-electron emission. This assumption becomes progressively less useful as the primary energy becomes closer to the core-level ionization energy for the relevant Auger transition or for increasing angles of incidence of the primary electrons.