Data Publication: Data from NIST IR "Report on VAMAS Round Robin of ISO 13067: Microbeam Analysis - Electron Backscatter Diffraction - Measurement of Average Grain Size"

This data publication includes electron backscatter diffraction (EBSD) data used to support the development of ISO 13067 "Microbeam Analysis - Electron Backscatter Diffraction - Measurement of Average Grain Size" as part of a Versailles Project on Advanced Materials and Standards (VAMAS) work area. EBSD data was collected on two commercially pure titanium samples. Two different scanning electron microscopes were used, and two staff independently performed measurements of 5 selected areas. The reports, data summaries, and raw data were provided back to the VAMAS work group for evaluation. Methods, discussion, and data summaries from these data sets are contained in the referenced NIST Internal Report (NIST IR). The referenced National Physical Laboratory (NPL) report is a summary of the round robin.