Isotropic plasma atomic layer etching of Al2O3
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https://figshare.com/articles/dataset/Isotropic_plasma_atomic_layer_etching_of_Al2O3/13011239
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资源简介：
Data used to plot all of the figures in the letter titled "Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3)". Each figure has its own page, original origin files are available upon request.
创建时间：
2020-10-21
