Ultracompact on-chip spectral shaping using pixelated nano-opto-electro-mechanical gratings

Achieving dynamic, arbitrary shaping of the light spectrum promises to revolutionize many photonic systems by offering unparalleled spectral efficiency and network flexibility. However, most existing optical components face rigid spectral functionalities with limited tunability, hindering compact and fast optical spectral shaping. Here, we introduce a pixelated nano-opto-electro-mechanical (NOEM) grating that exploits electromechanical-induced phase transitions for precise, pixel-level control of grating coupling strength, yielding a miniaturized (~0.005 mm²) on-chip spectral shaper. We demonstrate the synthesis of grating pixels for nearly arbitrary spectral responses and achieve rapid (<10 ns), high-contrast (>100 dB) wavelength-selective switching by harnessing synergetic, nanometer-scale electrostatic perturbations. Our pixelated NOEM grating delivers exceptional spectral manipulation capabilities in an ultracompact, on-chip manner, offering prospects for next-generation optic..., , # Data from: Ultracompact on-chip spectral shaping using pixelated nano-opto-electro-mechanical gratings

Dataset DOI: [10.5061/dryad.2v6wwq014](10.5061/dryad.2v6wwq014)

## Description of the data and file structure

The source data for the manuscript \"Ultracompact on-chip spectral shaping using pixelated nano-opto-electro-mechanical grating\" that is submitted to *Science*.

DOI: 10.1126/science.adu8492

Created by: Weixin Liu, 2025-06-08

Corresponding author: Chengkuo Lee, [[e-mail]](mailto:[e-mail])

National University of Singapore

### Files and variables

#### File: Supporting_Data_for_Ultracompact_on-chip_spectral_shaping_using_pixelated_NOEM_grating.zip

**Description:** 

Fig. 1I.xlsx - Vd: Applied voltage; d: grating core displacement;

Fig. 1J.xlsx - κ: coupling coefficient;

Fig. 2B.xlsx - λ: wavelength;

Fig. 2C.xlsx - Δλ: wavelength detuning;

Fig. S2.xlsx - # denotes the data is not applicable due to the occur of pull-in instability.

Fig. S4.xlsx - L: NO...,