Aggregate data for the article "Characterizing the Field of Atomic Layer Deposition: authors, topics, and collaborations"

Aggregate data for the article "Characterizing the Field of Atomic Layer Deposition: authors, topics, and collaborations". The article explores the evolution of ALD research over time using bibliometric, network, and text analysis.

Fig 1. Number of papers and journals that publish ALD research, and percentage among SCIE papers and journals.
Fig 2. Number of distinct authors who publish ALD research, number of authors who publish ALD research for the first time, and ratio of new and distinct authors.
Fig 3. Average number of collaborators per author per year.
Fig 4. Number of nodes of the largest component of the ALD collaboration network; Relative size of the largest component; Average path length.
Fig 5. Evolution of component sizes of the ALD collaboration network over time. Variables: year, numberOfNodes (number of nodes of a component), numberOfComponents (number of components that have a particular size) and relativeSize.
Fig 7. Percentage of ALD papers containing a specific word pertaining to broad types of materials in their titles
Fig 8. Percentage of ALD papers containing a specific word pertaining to materials that are likely to be grown by ALD in their titles.
Fig 9. Percentage of ALD papers containing a specific word pertaining to substrate materials in their titles.
Fig 10. Percentage of ALD papers containing a specific word pertaining to applications of ALD in their titles.
Fig 11. Percentage of ALD papers containing a specific word pertaining to the type of study or process in their titles.
Fig 12. Percentage of ALD papers containing words that start with nano in their titles.