基于硅基铌酸锂薄膜的5G N77频段大带宽声学滤波器相关数据

这项工作通过将横向拓扑与基于异质衬底的表面声波(SAW)谐振器相结合，探索了5G N77频段的大带宽声学滤波器的设计。与传统拓扑结构相比，横向拓扑结构可以通过谐振腔的机电耦合系数(K2)突破滤波器分数带宽(FBW)的限制。与体声波谐振器(BAW)相比，声表面波谐振器具有光刻定义的频率，可以满足横向拓扑的多频率设计要求。本文研究了异质基片上声表面波横向滤波器设计中存在的潜在问题，并通过仿真构建了覆盖5G N77频段的声表面波横向滤波器。该工作表明了横向声表面波滤波器的可行性，为实现大带宽声表面波滤波器的设计提供了研究思路。

This work explores the design of wideband acoustic filters for the 5G N77 band by combining lateral topology with surface acoustic wave (SAW) resonators based on heterogeneous substrates. Compared with conventional topologies, lateral topology can break through the limitation of filter fractional bandwidth (FBW) via the electromechanical coupling coefficient (K²) of the resonant cavity. Compared with bulk acoustic wave (BAW) resonators, SAW resonators feature photolithographically defined frequencies, which can meet the multi-frequency design requirements of lateral topologies. This paper investigates the potential issues in the design of SAW lateral filters on heterogeneous substrates, and constructs a SAW lateral filter covering the 5G N77 band through simulation. This work demonstrates the feasibility of lateral SAW filters, and provides research insights for the design of wideband SAW filters.

搜集汇总

背景与挑战

背景概述

该数据集围绕基于硅基铌酸锂薄膜的5G N77频段大带宽声学滤波器，通过结合横向拓扑与异质衬底表面声波谐振器，探索了突破滤波器带宽限制的设计方案。研究利用仿真构建了覆盖5G N77频段的声表面波横向滤波器，验证了该技术路径的可行性。