Effect of substrate pretreatment on the epitaxial growth of high-quality kappa-Ga2O3 layers on sapphire by halide vapor phase epitaxy
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This dataset contains raw data used in the manuscript "Effect of substrate pretreatment on the epitaxial growth of high-quality kappa-Ga2O3 layers on sapphire by halide vapor phase epitaxy".
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Zenodo创建时间：
2025-04-12
