Data accompanying the publication: "High-speed Coherent Fourier Scatterometry: Galvo mirror integration for fast surface inspection"

Authors (publication): Sarika Soman, Roland Horsten, Silvania F. Pereira<br>This dataset contains raw and processed experimental data and the helper functions used to support the findings in the publication “High-speed Coherent Fourier Scatterometry: Galvo mirror integration for fast surface inspection". The data was collected as part of a study on scan throughput improvement by beam scanning using a 1 kHz galvo mirror for optical metrology applications. It includes aberration measurements as a function of the galvo mirror angle, calibration measurements of the galvo mirror, system calibration data using reference samples, and scripts used for data processing. The dataset is organised to ensure reproducibility and reuse, and can be applied to related research in nanoscale surface inspection.