Supplemantory materials for Fourier Series based Analytic Model of a Resonant MEMS Mirror for General Voltage Inputs
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https://ieee-dataport.org/documents/supplemantory-materials-fourier-series-based-analytic-model-resonant-mems-mirror-general
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提供机构：
Albert, Stephan; Schitter, Georg; Yoo, Han Woong
创建时间：
2020-12-17
