A design method of microlens arrays for decoherence in lithography illumination systems
收藏科学数据银行2024-12-25 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=6cccf9b14c9a4283a8c47be907c65a46
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资源简介：
This dataset shows the light field distribution of the designed final decoherent microlens array at the back focal plane of the condenser.
提供机构：
Shanghai Institute of Optics and Fine Mechanics
创建时间：
2024-12-23
