research data

In this study, we employed corona poling to improve the piezoelectric properties of as-deposited BaTiO₃ films and conducted a vibration energy harvesting test. Dielectric measurements indicated that the dielectric constant of the as-deposited film increased with temperature, and the frequency dependence of the dielectric constant was minimal at room temperature. Applying an electric field of 1500 kV/cm resulted in a recoverable energy density of 7.1 J/cm³ and an energy storage efficiency of 54%. The corona polarization treatment could align dipoles under high electric fields and prevent dielectric breakdown owing to local defects created by the AD process. The vibration test yielded a harvested energy of 172 nJ and an output voltage of 2.67 V, which is suitable for force sensor applications. Polarization via corona discharge is also feasible without an electrode. Integrating AD with corona poling may benefit new capacitors, sensors, and energy harvesting technologies.本研究采用电晕极化（corona poling）工艺，以优化沉积态钛酸钡（BaTiO₃）薄膜的压电性能，并开展了振动能量收集测试。介电性能测试结果显示，沉积态钛酸钡薄膜的介电常数（dielectric constant）随温度升高而增大，且室温下其频率依赖性极弱。施加1500 kV/cm的电场时，可获得7.1 J/cm³的可恢复储能密度与54%的储能效率。电晕极化处理可在强电场下实现偶极子取向，同时避免沉积态制备过程引入的局部缺陷引发的介电击穿（dielectric breakdown）。振动测试结果表明，该系统可收集172 nJ的能量，输出电压达2.67 V，适用于力传感器应用场景。无需电极即可通过电晕放电实现极化，该方案同样具备可行性。将沉积态制备工艺与电晕极化技术相结合，有望为新型电容器、传感器及能量收集技术的发展提供助力。