Experimental Characterization of a Mode-Localized Acceleration Sensor Integrating Electrostatically Coupled Resonators
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https://aip.figshare.com/articles/dataset/Experimental_Characterization_of_a_Mode-Localized_Acceleration_Sensor_Integrating_Electrostatically_Coupled_Resonators/25097498
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资源简介：
The classical electrostatically driven double-ended solidly supported MEMS resonator
提供机构：
AIP Publishing
创建时间：
2024-01-28
