Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Name: Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit
Creator: Smith, Jack; Bommer, Sean; Xia, Zhongyi; Strain, Michael; Dawson, Martin; Guilhabert, Benoit; Englund, Dirk; Panuski, Christopher
Published: 2025-07-02 00:00:00
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Figshare2025-07-02 更新2026-04-08 收录

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https://springernature.figshare.com/articles/dataset/Transfer_printing_micro-assembly_of_silicon_photonic_crystal_cavity_arrays_beating_the_fabrication_tolerance_limit/28280786/1

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Source data for "Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit" paper

提供机构：

Smith, Jack; Bommer, Sean; Xia, Zhongyi; Strain, Michael; Dawson, Martin; Guilhabert, Benoit; Englund, Dirk; Panuski, Christopher

创建时间：

2025-07-02