Raman Spectroscopy Data for Ga₂O₃/por-GaAs/mono-GaAs Heterostructure

This dataset contains processed Raman spectroscopy data supporting the results presented in the article “Synthesis and Characterization of Ga₂O₃/por-GaAs/mono-GaAs Heterostructures for Advanced Electronic Applications.” The dataset includes a representative Raman spectrum of the Ga₂O₃/por-GaAs/mono-GaAs heterostructure used for phase identification and assessment of crystalline quality. Raman spectroscopy confirms the presence of characteristic vibrational modes of β-Ga₂O₃ and GaAs, as well as additional spectral features associated with the porous GaAs buffer layer. Only processed Raman data are provided. Raw spectral data and full instrumental parameters are intentionally not disclosed. An OriginLab project file (*.opju) containing the processed spectrum and plotting workflow used to generate Figure 2 of the article is included to ensure transparency of data handling and visualization. This dataset underpins the Raman analysis presented in the article and may be reused for comparative vibrational studies of oxide/semiconductor heterostructures. A detailed description of the dataset structure and scope is provided in the accompanying README.md file. Raman spectroscopy was employed to investigate the vibrational properties and phase composition of the Ga₂O₃/por-GaAs/mono-GaAs heterostructure. The Raman spectrum was recorded in the spectral range covering the characteristic phonon modes of Ga₂O₃ and GaAs. The dataset includes a processed Raman spectrum selected as representative of the synthesized heterostructure. Data processing involved baseline correction and normalization to facilitate reliable identification of vibrational modes. Visualization and plotting were performed using OriginLab software. The provided Origin project file reproduces the workflow used to generate the Raman spectrum presented in the article. Raw Raman spectra and detailed instrumental configuration are intentionally omitted and may be disclosed in future studies The dataset includes: One processed Raman spectrum of the Ga₂O₃/por-GaAs/mono-GaAs heterostructure (CSV format); One OriginLab project file (*.opju) containing the processed spectrum and plotting workflow.