In Situ GISAXS and XRR Investigation of Microstructural Evolution and Thermal Diffusion in Ion Beam Deposited Fe/Co Nano-Multilayers

Magnetic performance of nano-multilayer (NML) thin films is strongly influenced by multiple microstructural features. Microstructural modification by ion radiation and thermal annealing has proven to be an excellent tool for tuning multiscale material properties. In this work, we propose an in-depth investigation of diffusion mechanism and microstructural evolution in ion beam deposited (IBD) Fe/Co NMLs on a Si substrate, by combining large scale averaging techniques such as synchrotron in situ X-ray reflectometry (XRR) and in situ grazing-incidence small-angle X-ray scattering (GISAXS) at elevated temperatures. Quantifying these material responses will reveal dipper insights on how and why the final magnetic performance of Fe/Co NMLs is affected during annealing.