Replication Data for: Active Ultrahigh‐Q (0.2 × 106) THz Topological Cavities on a Chip

Rapid scaling of semiconductor devices has led to an increase in the number of processor cores and integrated functionalities onto a single chip to support the growing demands of high-speed and large volume consumer electronics. This burgeoning demand for an ever-increasing on-chip communication bandwidth has been a great challenge over the recent decades and has motivated a plethora of research to improve interconnect capacities in terms of bandwidth density for enhanced throughput and energy efficiency. Low-loss terahertz silicon interconnects with larger bandwidth offers good prospects to solve the existing inter/intra chip bandwidth density and energy efficiency bottleneck to cater to the heavy demands of enhanced on-chip system performance of most computers and embedded systems. Here, we present a low-loss terahertz topological interconnect-cavity system that can actively route signals through the interconnect and cavity with sharp bends, by coupling to a topological whispering gallery mode resonance with an ultra-high-quality (Q) factor of 0.2 × 106. The topologically protected large Q factor cavity enables energy-efficient optical control of the ultra-high-Q resonance showing 50 dB modulation. We further demonstrate the dynamic control of the critical coupling between the topological interconnect-cavity system that provides huge design flexibility for on-chip active tailoring of the cavity resonance linewidth, frequency, and modulation through complete suppression of the back reflection due to the topological protection. The on-chip topological cavity is CMOS-compatible and highly desirable for hybrid electronic-photonic technologies that holds the key for development of the sixth (6G) generation terahertz communication devices, including on-chip modulators, switches, signal routers, antennas, and multiplexers. Ultra-high-Q cavity also paves the path for the design of low threshold topological lasers, quantum integrated circuits, and nonlinear topological photonics.