高效率柔性铜铟镓硒电池器件共蒸发工艺包数据集
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本数据集研究了铜铟镓硒共蒸发工艺,通过调控碱金属的掺杂量,在分子束外延(MBE)系统中采用三步共蒸发蒸发各种元素,精确调控各种元素蒸发顺序、时间和温度,然后再利用碱金属进行后处理。最后采集了MBE共蒸发生长CIGS薄膜的数据。本数据集记录了工艺优化过程中柔性衬底CIGS共蒸发生长的温度控制曲线与工艺程序数据。
This dataset investigates the copper indium gallium selenide (CIGS) co-evaporation process. We co-evaporated various elements in three steps within a molecular beam epitaxy (MBE) system by adjusting the doping amounts of alkali metals, with precise control over the evaporation sequence, duration and temperature of each element, followed by post-treatment using alkali metals. Finally, data on CIGS thin films grown via MBE co-evaporation were collected. This dataset records the temperature control curves and process program data for CIGS co-evaporation growth on flexible substrates during process optimization.




