TCAD simulation of leakage current through thin Al2O3 layers calibrated on experimental data, including calibrated model parameters
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This dataset contains: Simulated results of leakage current through thin Al2O3 layers obtained by calibrated TCAD simulations Information about simulator and model used Calibrated model parameters This calibrated model has been presented and used in the publication: 10.1109/ACCESS.2025.3561255
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Zenodo创建时间：
2025-09-03
