Data Set of Extracted Summary Statistics from Equipment Sensor Data

This data set was generated in accordance with the semiconductor industry and contains values of summary statistics from sensor recordings of the high-precision and high-tech production equipment. Basically, the semiconductor production consists of hundreds of process steps performing physical and chemical operations on so-called wafers, i.e. slices based on semiconductor material. In the production chain, each process equipment is equipped with several sensors recording physical parameters like gas flow, temperature, voltage, etc., resulting in so-called sensor data. Out of the sensor data, values of summary statistics are extracted. These are values like mean, standard deviation and gradients. To keep the entire production as stable as possible, these values are used to monitor the whole production in order to intervene in case of deviations.

After the production, each device on the wafer is tested in the most careful way resulting in so-called wafer test data. In some cases, suspicious patterns occur in the wafer test data potentially leading to failure. In this case the root cause must be found in the production chain. For this purpose, the given data is provided. The aim is to find correlations between the wafer test data and the values of summary statistics in order to identify the root cause.

The given data is divided into four data sets: "XTrain.csv", "YTrain.csv", "XTest.csv" and "YTest.csv". "XTrain.csv" and "XTest.csv" represent the values of summary statistics originating in the production chain separated for the purpose of training and validating a statistical model. Included are 114 observations of 77 parameters (values of summary statistics). The "YTrain.csv" and "YTest.csv" contain the corresponding wafer test data (144 observations of one parameter).