High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

Name: High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
Creator: Liu, Junqiu; Huang, Guanhao; He, Jijun
Published: 2020-11-14T00:00:00+08:00

Zenodo2020-11-14 更新2026-04-07 收录

氮化硅光子电路制造

集成光子学工艺优化

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Available data for "High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits"

提供机构：

Liu, Junqiu; Huang, Guanhao; He, Jijun

创建时间：

2020-11-14

High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

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