Replication Data for Eco-Friendly and Large-Scale Fabrication of Microelectronic Silk-Based Enzymatic Biosensors

This dataset contains the raw and processed experimental data associated with the study "Eco-Friendly and Large-Scale Fabrication of Microelectronic Silk-Based Enzymatic Biosensors". The collection includes measurements related to silk fibroin film fabrication and characterization, electron-beam lithography process optimization, nanostructure dimensional analysis, and enzymatic activity assays of horseradish peroxidase immobilized within silk fibroin matrices. Raw instrument outputs, processed datasets, statistical analyses, and metadata describing experimental conditions are provided to ensure transparency and reproducibility. The dataset supports the development of environmentally friendly microfabrication strategies for enzyme-based bioelectronic devices and may be reused for studies involving silk fibroin processing, enzyme immobilization, biopolymer lithography, and microelectronic biosensor fabrication