Replication Data for: Scalable production of solid-immersion lenses for quant...
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Data to replicate the experimental data plots in the paper: Fig. 1d, e: AFM scans of SIL before the etching and after the etching, possibility to see how the mask changed in the...
本数据集用于复现论文中的实验数据绘图：图1d、e为刻蚀前后的固态浸没透镜（Solid Immersion Lens, SIL）原子力显微镜（Atomic Force Microscope, AFM）扫描图像，可用于观察掩模的变化情况……
