XPS data of deuterium and hydrogen grown boron-doped diamond

The high-resolution C1s X-ray absorption spectra of BDD@H and BDD@D samples were measured using the facilities of the HE-SGM beamline (HE-SGM) at the BESSY II synchrotron radiation source of Helmholtz–Zentrum Berlin (HZB).[90] The measurements were carried out under ultra-high vacuum conditions: P ≈ 2×10−9 Torr at T = 300 K. The NEXAFS spectra were obtained by recording the total electron yield (TEY) using PEY/TEY detector. The monochromator energy resolution near the C1s absorption edge (hv ≈ 285 eV) was ≈100 meV. The size of the X-ray spot on the sample was ≈1200 × 200 μm. The photon energies in the range of the fine structure of the C1s X-ray absorption spectra were calibrated against the energy position of the first narrow peak in the C1s X-ray absorption spectrum of HOPG (hv ≈ 285.45 eV).[91,92] No radiation damage of the samples was observed during the entire duration of the experiment. The BDD@D and BDD@H were synthesized in the Microwave Plasma Assisted Chemical Vapor Deposition process. Diamond films were deposited on p-type (100) silicon substrates (1 × 1 cm2) and studied by Raman spectroscopy. 
The selected measurements were utilized when preparing the manuscript published in Small DOI: 10.1002/smll.202208265