Data from "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine"
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下载链接：
https://datacommons.princeton.edu/discovery/doi/10.34770/zqj0-3z73
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资源简介：
Data and input files related to the paper "Deep Potential Molecular
Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic
Chlorine". The repository includes the final DeepMD model file used
to perform simulations, the training data set used to train the model,
LAMMPS input files to perform impact simulations, and data tables
summarizing the results obtained in this study.
提供机构：
Princeton University
创建时间：
2025-07-01
