Data from "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine"

Name: Data from "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine"
Creator: Princeton University
Published: 2025-07-01T23:53:02+08:00

DataCite Commons2026-02-22 更新2026-04-25 收录

数据链接：

https://datacommons.princeton.edu/discovery/doi/10.34770/zqj0-3z73 数据链接链接失效反馈

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资源简介：

Data and input files related to the paper "Deep Potential Molecular Dynamics Simulations of Ion-Enhanced Etching of Silicon by Atomic Chlorine". The repository includes the final DeepMD model file used to perform simulations, the training data set used to train the model, LAMMPS input files to perform impact simulations, and data tables summarizing the results obtained in this study.

提供机构：

Princeton University

创建时间：

2025-07-01