Temperature calibration, normal force measurements, undisturbed motion measurements, and stick-slip motion cycles in MEMS devices with sliding sidewall surfaces

This .zip file contains research data sets acquired to investigate the temperature dependence of friction in MEMS devices with sidewall surfaces subject to frictional contact. The corresponding folders include: (a) the peak position measurements from Raman spectroscopy (Raman measurements), (b) the displacement measurements of the 'ram' until it touches a counter-surface for the normal force per contact temperature (normal force data), (c) the displacement measurements of the sliding counter-surface per temperature when it is not in contact with the ram (undisturbed data), (d) the displacement measurements of the counter-surface for increasing temperature when it is in contact with the ram (friction data from 25 to 300), and (e) the displacement measurements of the counter-surface for decreasing temperature when it is in contact with the ram (friction data from 300 to 25).<br>