Interlaboratory comparison of XRF analysis on thin films, including alloys, oxides, multilayers, and a lithium-ion battery material

This dataset contains the XRR data for Figure 3 of "Interlaboratory comparison of XRF analysis on thin films, including alloys, oxides, multilayers, and a lithium-ion battery material". The XRR data for Figure 3, contained in the file XRR.csv, has three columns, which are seperated by commas: θ [°] - the grazing angle of incidence in degree Rexp - the measured reflectance Rfit - the reflectance determined by the fit