NbTiN film data
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NbTiN data for different deposition conditions. Data include, Tc, resistivity, film thickness, deposition power, Ar flow, N2 flow, Nb content, Ti content and N content
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2023-11-14
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NbTiN data for different deposition conditions. Data include, Tc, resistivity, film thickness, deposition power, Ar flow, N2 flow, Nb content, Ti content and N content