OCT experimental spectral data, EUV range.

data are preented in tabelarized form. First column is a wavelength wector in [nm], second column: OCT sample reflectivity with Zr filter, third column: OCT sample reflectivity with Al filter, fourth (D) column: reference reflectivity from Si wafer and Zr filter, fifth (E) column: reference reflectivity from Si wafer and Al filter. Sample: Si wafer with Au (10nm width) buried layer.