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Lowering the activation temperature of Ti-Zr-V non-evaporable getter films by removing surface carbon contamination: an in situ XPS study

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DIGITAL.CSIC2025-01-21 更新2026-05-11 收录
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https://digital.csic.es/handle/10261/377308
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资源简介:
Original raw data of XPS spectra obtained in ORIGIN format. Columns (X) correspond to binding energies and columns Y to XPS intensity (Y). The different plasma and annealing conditions are indicated in the corresponding columns (“in Comments”). Labels in “Long name” files correspond to the original CasaXPS files names. Photon energy is 1486.6 eV.
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2025-01-21
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