Aluminium Nitride based Layered One-Port Surface Acoustic Wave Resonator Sensor: Design, Fabrication, and Analysis

This research focuses on the design, fabrication, and characterisation of a layered one-port surface acoustic wave (SAW) resonator based on aluminium nitride (AlN). The device utilises SAW propagation to detect environmental changes, including humidity and ultraviolet (UV) exposure, by analysing shifts in its resonance characteristics. A novel modeling approach is developed to simulate the resonator’s response, providing deeper insights into its SAW behaviour. The study advances the understanding of SAW-based sensing mechanisms and contributes to the development of high-performance sensors for environmental monitoring and industrial applications.