Experimental data set for annealing of HfO2 coatings via plasma-enhanced atomic layer deposition
收藏科学数据银行2023-02-22 更新2026-04-23 收录
下载链接：
https://www.scidb.cn/detail?dataSetId=2233de983ee94ad29248730988fa9c1b
下载链接
链接失效反馈官方服务：
资源简介：
In this work, we improved the LIDT of PEALD HfO2 coating by optimizing annealing parameters. This data set includes the test results of various properties of HfO2 coating under different annealing atmospheres (nitrogen and oxygen atmospheres) and annealing temperatures, including optical constants, crystal structure, chemical composition, optical absorption and laser-induced damage threshold.
提供机构：
Zesheng Lin; Tianbao Liu; Shanghai Institute of Optics and Fine Mechanics; Meiping Zhu; Jianda Shao
创建时间：
2023-02-21
