Experimental data set for annealing of HfO2 coatings via plasma-enhanced atomic layer deposition
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资源简介：
In this work, we improved the LIDT of PEALD HfO2 coating by optimizing annealing parameters. This data set includes the test results of various properties of HfO2 coating under different annealing atmospheres (nitrogen and oxygen atmospheres) and annealing temperatures, including optical constants, crystal structure, chemical composition, optical absorption and laser-induced damage threshold.
提供机构：
Zesheng Lin; Tianbao Liu; Shanghai Institute of Optics and Fine Mechanics; Meiping Zhu; Jianda Shao创建时间：
2023-02-21
