HIM and AFM Data set from first AFM in the HIM test

In this work, the integration of an atomic force microscope (AFM) into a helium ion microscope<br>
(HIM) is reported for the first time. The helium ion microscope is a powerful instrument, capable of sub-<br>
nanometer resolution imaging and machining nanoscale structures, while the AFM is a well-established<br>
versatile tool for multiparametric nanoscale metrology. Combining the two techniques opens the way for<br>
unprecedented, in-situ, correlative analysis at the nanoscale. Nanomachining and analysis can be<br>
performed without contamination of the sample as well as avoiding environmental changes between<br>
processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques as<br>
the AFM offers not only true 3D topography maps---something the HIM can only provide in an indirect<br>
way---but also allows for nanomechanical property mapping, as well as electrical and magnetic<br>
characterisation of the sample after focused ion beam materials modification with the HIM. The<br>
experimental setup is described and evaluated through a series of correlative experiments, demonstrating<br>
the feasibility of the integration.