Depth XPS profile of vanadium pentoxide
收藏Most Wiedzy Open Research Data Catalog2026-04-17 收录
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Vanadium pentoxide sample was manufactured by sol-gel method and deposited on a substrate by spin coating technique. To determine depth profile of chemical composition of thin film, etching by Argon ion gun was used. Thin film was etched three times. Chemical composition was measured by XPS method.
