Electron Bessel beam diffraction patterns, line scan of Si/SiGe multilayer
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Electron diffraction patterns taken with a conical illumination (electron Bessel beams) and can be used to measure strain. The experimental diffraction patterns, in DM3 format, are included in the file experimental_data.7z while FEM strain simulations for the same sample are in the file reference_strain_experimental.csv Simulated diffraction patterns are included in the file simulated_patterns.7z while the strain in the model used is in the file reference_strain_simulated_patterns.csv The two python scripts attached allow the extraction of the strain, and rely on the code published at: https://bitbucket.org/lutosensis/tem-thesis/
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Zenodo创建时间:
2019-02-18



