Experimental_X-ray_spectroscopy_CNx_WP2-3_NASU

Measurements were performed under WP2-3. The main purpose of the research is investigation of structure of nitrogenated amorphous carbon films deposited under various regimes. X-ray reflectivity measurements were performed in order to verify density and porosity of the samples. Data set contains spectra of CNx samples deposited with different nitrogen flow (N2/CH4 ratio 15/4 for KO360 and KO361 samples, 10/9 for KO363, 5/15 for KO365 and 0/15 for KO369 sample), each sample have been measured as-deposited and after vacuum annealing at 750℃ (spectra of annealed samples in the data set file marked “KO36_ann”, see corresponding Note column). Omega/2Theta column unit is deg, Intensities in imp/s.