SHEAR-4

%% Description of the dataset %% Here are the data from Energy Dispersive X-ray spectroscopy (EDX) atomic quantification, used to estimate the thickness of thin films deposited on an electrode and exposed to plasma. These were published in: http://www.doi.org/10.1088/1361-6595/acfc63 The folders of the archive file are constructed as follows:- ALINE: the electrode exposed in ALINE facilities - BUMP_10deg_No-counter-electrode- BUMP_10deg_With-counter-electrode- BUMP_Circular_electrode_100mT Each of them contains folders "before" and "after" corresponding to the data collected before and after plasma exposure as described in the http://www.doi.org/10.1088/1361-6595/acfc63 In each subfolder, there is the quantification data exported from the measurements software, named as follows: 5kVAline2afterx2.csv - with 5kV, the energy of the beam, which is varied from 5 to 30kV- Aline for ALINE or CL14 for BUMP_10deg_No-counter-electrode or CL15 for BUMP_10deg_With-counter-electrode or BUMP01 for BUMP_Circular_electrode_100mT- after or before- and x2 represent the points of measurements along the x-axis (the possible points are x1 to x10 and y1 to y10)