Data publication: Modification of Porous Ultralow‑k Film by Vacuum Ultraviole...
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https://b2find.eudat.eu/dataset/2a89c21a-c7bc-56b2-9e32-023e8115439b
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Modification of spin-on-deposited porous PMO (periodic mesoporous organosilica) ultralow-k (ULK) SiCOH films (k = 2.33) containing both methyl terminal and methylene bridging...
