本数据集为论文“Stress analysis and Q-factor of free-standing (La,Sr)MnO3 oxide resonators”的配套数据,包含关于La,Sr)MnO3(LSMO)自由站立式氧化物谐振器的应力分析与Q因子相关数据,以压缩包形式提供。 论文“Stress analysis and Q-factor of free-standing (La,Sr)
CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectr