Dataset Title Water Vapor Dynamics in High-Vacuum Systems: Experimental Measurements and Numerical Simulations

This dataset contains ten figure files accompanying the manuscript on water-vapor behavior in a high-vacuum chamber. The collection covers: baseline measurements from the static pressure-rise method; pump-down curves under four internal configurations; the chamber geometry model; comparisons between Langmuir/Freundlich adsorption models and experiments; spatial pressure maps at representative times; and the effects of external leak rate and leak-site distribution on local vacuum conditions. The dataset supports reproduction of trends, benchmarking of adsorption-kinetics models in complex geometries, and engineering optimization of vacuum systems.