[Dataset] Linnik-Interferometer with Ring-Shaped Optical MEMS Shutter Array enabling dynamic annular illumination for fast and reliable measurement of sloped and curved surface microstructures

This dataset contains the raw measurement data underlying the associated publication. All measurements were acquired using a Linnik interferometer equipped with 0.95 NA objectives and a royal blue LED as the illumination source. Image acquisition was performed during an axial scan of the measurement object, with a fixed step size of 20 nm between successive frames. To improve measurement reliability at high surface slopes, an optical MEMS array functioning as a ring shutter was introduced into the illumination pathway. The effectiveness of this approach is validated through measurements of steel spheres with a nominal diameter of approximately 6 µm.