Demo datasets used by the openECCI Python library

Demo datasets used by the openECCI Python library for Electron Channelling Contrast Imaging (ECCI) analysis of crystal defects in scanning electron microscope (SEM).

EBSD map

File name
ebsd_map/20kv_26nA_15mm WD_4x4 bin_fcc_Fe Map.ctf

Description
A set of experimental EBSD map from a polycrystalline fcc austenitic stainless steel sample of (664 x 499) acquired using an electron beam of 20kV, 26nA, working distance 15mm, binning 4x4 in a JEOL JSM-7001F FEGSEM equipped with Oxford Instruments Nordlys Max2 EBSD detector.

File name
ebsd_map/20kv_26nA_15mm WD_4x4 binning Si Map.ctf

Description
A set of experimental EBSD map from a single crystal Si[001] specimen of (48 x 35) acquired using an electron beam of 20kV, 26nA, working distance 15mm, binning 4x4 in a JEOL JSM-7001F FEGSEM equipped with Oxford Instruments Nordlys Max2 EBSD detector.

EBSD master pattern

File name
ebsd_master_pattern/Fe-master-20kV.h5

Description
EBSD master pattern of FCC Fe at 20kV simulated using EMsoft package ver. 5.0.20221208.

File name
ebsd_master_pattern/Si-master-20kV.h5

Description
EBSD master pattern of Si at 20kV simulated using EMsoft package ver. 5.0.20221208.

Electron Channelling Pattern (ECP) from FCC austenitic stainless steel specimen

File name
fcc_fe/01_Si_ref.tif

Description
Reference ECP acquired from Si[001] attached with the austenitic stainless steel specimen.

File name
fcc_fe/01_steel_overview.tif

Description
A low magnification BSE image acquired from the region has been EBSD mapped on the austenitic stainless steel specimen.

File name
fcc_fe/steel_ECP_xxx.tif & fcc_fe/steel_SEM_xxx.tif

Description
Images pairs of higher magnification BSE images and the ECP acquired from the corresponding region.

ECP pattern from Si[001] wafer at different stage orientations

File name
si_wafer/TFS/Si_xtilt_xrot_xxx.tif

Description
ECP acquired from Si[001] attached with the austenitic stainless steel specimen with different SEM stage tilt/rotation combinations.