Investigation of adhesion layers for the deposition of magnetostrictive CoxFe(1-x) films on ScyAl(1-y)N films for magnetoelectric MEMS sensors

For magnetoelectric film stacks, Co/Fe multilayers are deposited on piezoelectric (Sc)AlN films on Si/SiO2 substrates and subsequently annealed by rapid thermal annealing (RTA) to create a Co-Fe alloy phase. In this study, the influence of an optional adhesion layer of 5 nm Cr or Zr on the phase transformation and interlayer properties was investigated. The dataset provided contains logfiles from the RTA process, raw data of X-ray diffraction (XRD), enery dispersive X-ray spectroscopy (EDS) measurements and scanning electron microscope (SEM) images of focused ion beam (FIB) prepared cross-sections.