Dataset supporting the publication "Vertical Integration of KTN on SOI Wafer"
收藏DataCite Commons2024-08-28 更新2024-07-13 收录
下载链接:
https://eprints.soton.ac.uk/490435/
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资源简介:
This dataset contains all the FIB-SEM images, experimental and simulation data used to generate the figures included in the main text of the publication "Vertical Integration of KTN on SOI Wafer" in Optics Express (2024) https://doi.org/10.1364/OE.525582
This dataset contain three main folders:
The first folder (experiment) contains all experimental data obtained from passive characterisation of the structures.
The second folder (simulation) contains simulation EME file and the final sweep results.
The third folder (images) contains the microscopic and FIB-SEM images.
The files are presented in excel files, JPG files for images and lsf, and lms files for simulations.
The data is accessible via CC BY license.
提供机构:
University of Southampton
创建时间:
2024-05-29



