The data of the article "The origin, characteristics, and suppression of residual nitrogen in an MPCVD diamond growth reactor"

The data related to the article “The origin, characteristics, and suppression of residual nitrogen in a MPCVD diamond growth reactor" was published in the journal of Chinese Physics B. It contains the Excel file, which is described below:The growth rate, surface morphology, crystalline quality and nitrogen-vacancy luminecense (NV) have been studied with residual nitrogen or not in the article, including optical emission spectroscopy (OES), Raman spectra, XRD spectra and photoluminescence (PL) sepctra. A quadrupole mass spectrometry was also been applied to detect the leakage. Besides, we have provided an effective way to suppress the residual nitrogen in a slightly leaked system by modifying the susceptor geometry.