Data for "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"

Name: Data for "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"
Creator: Baek, Inkeun; Tonouchi, Masayoshi; Murakami, Fumikazu; Bae, Sangwoo; Ryu, Sungyoon; Yang, Yusin; Suzuki, Kenji; Kim, Ingi; Sung, Dougyong; Ueyama, Shinji; Lee, Myungjun
Published: 2025-05-27 00:00:00
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Figshare2025-05-27 更新2026-04-08 收录

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https://figshare.com/articles/dataset/Data_for_Non-contact_and_nanometer-scale_measurement_of_PN_junction_depth_buried_in_Si_wafers_using_terahertz_emission_spectroscopy_/28766750/1

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资源简介：

Data set for paper titled "Non-contact and nanometer-scale measurement of PN junction depth buried in Si wafers using terahertz emission spectroscopy"

提供机构：

Baek, Inkeun; Tonouchi, Masayoshi; Murakami, Fumikazu; Bae, Sangwoo; Ryu, Sungyoon; Yang, Yusin; Suzuki, Kenji; Kim, Ingi; Sung, Dougyong; Ueyama, Shinji; Lee, Myungjun

创建时间：

2025-05-27