ImmersionEllipsometry_supplementary_materials

The archive contains software tools, written in Octave, for solving some inverse problems in ellipsometry.
This material is Supplementary Data to a paper named “Analytical Solutions for Layer and Substrate Parameters Determination Using Amplitude Reflection Coefficients”.
The study provides analytical solutions for determining layer and substrate parameters using amplitude reflection coefficients, which can be experimentally obtained through immersion ellipsometry. Four cases are considered: an absorbing layer on an arbitrary or homogeneous substrate, and a non-absorbing layer on an arbitrary or homogeneous substrate. For each case, explicit formulas are provided to determine the layer’s refractive index and thickness. In the case of a non-absorbing layer on a non-absorbing homogeneous substrate, all system parameters, including the layer’s refractive index, thickness, and the substrate’s refractive index, are determined.