Research on the Thermal Expansion Mechanism of Self-traceable grating Spacing Based on Thermo-Mechanical Coupling Modeling and Finite Element Simulation Analysis--research data

For the coupled thermo-mechanical model of self-traceable gratings under variable temperature conditions, this study employs a cross-verification approach combining theoretical modeling and finite element simulation. The model is applicable to cases where the substrate thickness is significantly greater than the thin-film thickness.

The dataset includes:
(1) Computational codes
(2) Interfacial shear stress distributions along the substrate-film interface for both types of substrate-based self-traceable gratings
(3) Comparative results of grating pitch variations

In the finite element simulations, the thermal expansion changes per cycle were extracted by tracking the position of atomic packet distribution centers within grating cells. The difference in single-period expansion between edge and center positions was negligible. For theoretical calculations, the atomic layer width was set consistent with actual self-traceable gratings - sufficiently small to approximate two-dimensional planar computation.